Description
Supplementary information for the 'Fabrication Process', 'Spring Constant, Linearity and Maximum Deflection - Analysis', 'Spring Constant, Linearity and Maximum Deflection - Measurement' and 'Electrical Test Circuit'. Includes Supplementary Table S1 and Figures S1 - S21.
Date made available | 28 Mar 2018 |
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Publisher | Elsevier BV |