TY - JOUR
T1 - Structure, mechanical and tribological properties of MoSe2 and Mo-Se-N solid lubricant coatings
AU - Hudec, Tomáš
AU - Izai, Vitalii
AU - Satrapinskyy, Leonid
AU - Huminiuc, Teodor
AU - Roch, Tomáš
AU - Gregor, Maroš
AU - Grančič, Branislav
AU - Mikula, Marián
AU - Polcar, Tomáš
N1 - Funding Information:
Part of the work was carried out with the support of CEITEC Nano Research Infrastructure (ID LM2015041 , MEYS CR, 2016–2019), CEITEC Brno University of Technology. T.P. acknowledges the support from OPVVV grant Novel nanostructures for engineering applications No. CZ.02.1.01/0.0/0.0/16026/0008396.
Funding Information:
This work was supported by the Slovak Research and Development Agency [Grant No. APVV-17-0320 ], Scientific Grant Agency [ VEGA 1/0381/19 ], and Operational Program Research and Development [project ITMS 26210120010 ].
Funding Information:
This work was supported by the Slovak Research and Development Agency [Grant No. APVV-17-0320], Scientific Grant Agency [VEGA 1/0381/19], and Operational Program Research and Development [project ITMS 26210120010]. This project has received funding from the European Union's Horizon 2020 research and innovation programme under grant agreement No. 721642: SOLUTION. Part of the work was carried out with the support of CEITEC Nano Research Infrastructure (ID LM2015041, MEYS CR, 2016?2019), CEITEC Brno University of Technology. T.P. acknowledges the support from OPVVV grant Novel nanostructures for engineering applications No. CZ.02.1.01/0.0/0.0/16026/0008396.
Funding Information:
This project has received funding from the European Union's Horizon 2020 research and innovation programme under grant agreement No. 721642 : SOLUTION.
Publisher Copyright:
© 2020 Elsevier B.V.
PY - 2021/1/15
Y1 - 2021/1/15
N2 - Mo-Se-N films were prepared by pulsed direct current (DC) High Target Utilisation Sputtering (HiTUS) in reactive Ar + N2 atmosphere. Here, the effect of nitrogen doping was studied. MoSex film with Se/Mo atomic ratio ~ 2 exhibited polycrystalline structure and the lowest coefficients of friction (COFs) in humid air from 0.025 to 0.1 for loads in the range 2–45 N. Mo-Se-N coatings were deposited with N concentrations ranging from 1 to 40 at.%, whereas Se/Mo ratio varied from 0.6 to 2. Mo-Se-N coatings formed amorphous structures for the N contents above 7 at.% and increased hardness proportional with the N content up to 9 GPa. The addition of nitrogen also resulted in a general decrease in wear rate of two orders of magnitude when compared to pristine films while retaining a reasonably low coefficient of friction. Mo-Se-N films showed notable COF values in humid environment ranging from 0.22 to 0.015 when tested using loads from 2 to 45 N. The excellent friction properties of Mo-Se-N films were associated to the crystallisation of a MoSe2 tribofilm in the wear scar. Moreover, we showed that modern pulsed DC HiTUS technology represents a suitable way of producing thin films with a variety of elemental compositions and desired mechanical and tribological properties, even from sensitive, semi-conducting and extremely low thermally conductive MoSe2 targets.
AB - Mo-Se-N films were prepared by pulsed direct current (DC) High Target Utilisation Sputtering (HiTUS) in reactive Ar + N2 atmosphere. Here, the effect of nitrogen doping was studied. MoSex film with Se/Mo atomic ratio ~ 2 exhibited polycrystalline structure and the lowest coefficients of friction (COFs) in humid air from 0.025 to 0.1 for loads in the range 2–45 N. Mo-Se-N coatings were deposited with N concentrations ranging from 1 to 40 at.%, whereas Se/Mo ratio varied from 0.6 to 2. Mo-Se-N coatings formed amorphous structures for the N contents above 7 at.% and increased hardness proportional with the N content up to 9 GPa. The addition of nitrogen also resulted in a general decrease in wear rate of two orders of magnitude when compared to pristine films while retaining a reasonably low coefficient of friction. Mo-Se-N films showed notable COF values in humid environment ranging from 0.22 to 0.015 when tested using loads from 2 to 45 N. The excellent friction properties of Mo-Se-N films were associated to the crystallisation of a MoSe2 tribofilm in the wear scar. Moreover, we showed that modern pulsed DC HiTUS technology represents a suitable way of producing thin films with a variety of elemental compositions and desired mechanical and tribological properties, even from sensitive, semi-conducting and extremely low thermally conductive MoSe2 targets.
KW - Hardness enhancement
KW - Low friction
KW - Mo-Se-N
KW - MoSe
KW - Solid lubricant
KW - Sputtering
UR - http://www.scopus.com/inward/record.url?scp=85094568484&partnerID=8YFLogxK
UR - https://eprints.soton.ac.uk/454824/
U2 - 10.1016/j.surfcoat.2020.126536
DO - 10.1016/j.surfcoat.2020.126536
M3 - Article
AN - SCOPUS:85094568484
SN - 0257-8972
VL - 405
JO - Surface and Coatings Technology
JF - Surface and Coatings Technology
M1 - 126536
ER -